之前IBM研發28奈米製程技術，已經非常不容易了，在大部份的微晶片技術在45奈米左右，最小可以到22奈米，但現在IBM與加州理工學院(California Institution of Technology)合作，開發另一項DNA微晶片技術，將奈米微晶片的精細提升到6奈米的境界。
Published online: 16 August 2009 | doi:10.1038/nnano.2009.220
Placement and orientation of individual DNA shapes on lithographically patterned surfaces
Ryan J. Kershner1,4, Luisa D. Bozano1, Christine M. Micheel1,4, Albert M. Hung1,4, Ann R. Fornof1,4, Jennifer N. Cha1,4, Charles T. Rettner1, Marco Bersani1,4, Jane Frommer1, Paul W. K. Rothemund2 & Gregory M. Wallraff1
Artificial DNA nanostructures1, 2 show promise for the organization of functional materials3, 4 to create nanoelectronic5 or nano-optical devices. DNA origami, in which a long single strand of DNA is folded into a shape using shorter 'staple strands'6, can display 6-nm-resolution patterns of binding sites, in principle allowing complex arrangements of carbon nanotubes, silicon nanowires, or quantum dots. However, DNA origami are synthesized in solution and uncontrolled deposition results in random arrangements; this makes it difficult to measure the properties of attached nanodevices or to integrate them with conventionally fabricated microcircuitry. Here we describe the use of electron-beam lithography and dry oxidative etching to create DNA origami-shaped binding sites on technologically useful materials, such as SiO2 and diamond-like carbon. In buffer with 100 mM MgCl2, DNA origami bind with high selectivity and good orientation: 70–95% of sites have individual origami aligned with an angular dispersion (1 s.d.) as low as 10° (on diamond-like carbon) or 20° (on SiO2).